Two Meaglow series 50 hollow cathode plasma sources have now been installed at Hanyang University, South Korea, in the Nano-Device Engineering Laboratory. Apparently the first performed so well, they needed another. The picture to left shows the second source in operation at the university. A third plasma source has also now been supplied to a second group at Hanyang, as shown in the image below. To date six sources have been supplied throughout South Korea, and all the sources have been installed on locally built ALD systems with the cooperation of local vendors. Our local agent Paultec Company Ltd. can be contacted at firstname.lastname@example.org
Meaglow’s Chief Scientist, Dr. K. Scott Butcher has provided an on-demand talk for this year’s virtual #ALDALE2020 event available on-line from the 29th of June 2020. The talk is entitled “Recent Advances in Hollow Cathode Technology for Plasma Assisted ALD” and will be talk AF2-MoA4 in the ALD Fundamentals section. The talk will provide basic information about hollow cathode plasma sources, for which there has been significant uptake in the ALD community. It will also talk about some new work with large area aluminum hollow cathode sources.
More information available at https://ald2020.avs.org/online-desktop-planner/
Meaglow has sent 3 of its 4″ diameter large area hollow cathode sources to the equipment manufacturer Okyay Tech, www.okyaytechald.com. This Meaglow design represents a change in the plasma source paradigm of using small area high intensity plasma sources and then diluting the active species over a large area. Instead, these hollow cathode sources have about the same diameter as the substrate, and a very high plasma density over that whole area.
Meaglow has also produced 8″ and 12″ diameter versions of this large area design. Check out the Meaglow website for our other hollow cathode plasma products, www.meaglow.com
Meaglow makes high intensity plasma sources, can these help during the Covid-19 pandemic?
Meaglow’s Dr. Butcher visited Caltech’s Painter group this December to make some adjustments to their hollow cathode plasma source, which is being used to improve the quality of their nitride films. Dr. Butcher also gave a talk to some students while he was there. A big thanks to Steven Wood, who hosted us.
Some nice Raman and other optical spectroscopy results for GaN films grown at only 200 C with a plasma assisted ALD system converted to use with one of our hollow cathode plasma sources. The results have recently been published in. J. Vac. Sci. Technol. A 37 (2019) 050901 by Nese Gungor and Mustafa Alevli of Marmara University in Turkey. There are some impressively narrow phonon line widths for GaN grown at that temperature. This is the 28th paper we are aware of on ALD using hollow cathode plasma sources, and this paper continues to demonstrate the dominance in the low temperature growth of GaN by the Turkish groups making use of hollow cathode technology.
The main advantage of the hollow cathode plasma sources has been the reduction of oxygen contamination from the source itself. The attached image shows a quartz ICP source etched through over a period of some years by plasma etching. This source of oxygen contamination has been known since at least 1989 and is discussed in our company white paper “Oxygen Contamination in PE-ALD“. However, the hollow cathode sources are also high radical density plasma sources with many other lesser known advantages (see “Hollow Cathode Plasma Sources for Plasma Enhanced ALD and PECVD“).
Meaglow Ltd has sent it’s second Series 50 hollow cathode plasma source to South Korea. A big thanks to our local agents Paultec Co. Ltd. for penetrating into this market, we couldn’t have done it without them. The Series 50 is our most popular source, so it’s been good to see it’s sales into Asia. Most of our plasma sources have gone to the US, but Asia is our second biggest market with multiple sales to Taiwan, Turkey, India, and now, South Korea. There has also been a single sale to Israel.
Says company President, Scott Butcher: “Our biggest customer to date is actually the National Taiwan University, who have five of our plasma sources on site for various ALD systems, though sales to South Korea seem to be picking up. Results for the first plasma source over there have been very good and word is getting around. We hope to see a third sale later in the year“.
Meaglow will be there next week!
Dr K. Scott Butcher (pictured below) will be attending ALD 2019, but to give him a bit of time to go to some of the talks Meaglow will have a literature table. You can catch up with Scott by texting him on +1 807 252 4391 during the conference, or you can email him at email@example.com Scott will be happy to talk about plasmas and hollow cathode sources with you.