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Hollow Cathode Plasma Sources Talk for Virtual ALD/ALE-2020

Meaglow’s Chief Scientist, Dr. K. Scott Butcher has provided an on-demand talk for this year’s virtual #ALDALE2020 event available on-line from the 29th of June 2020. The talk is entitled “Recent Advances in Hollow Cathode Technology for Plasma Assisted ALD” and will be talk AF2-MoA4 in the ALD Fundamentals section. The talk will provide basic information about hollow cathode plasma sources, for which there has been significant uptake in the ALD community. It will also talk about some new work with large area aluminum hollow cathode sources.

More information available at  https://ald2020.avs.org/online-desktop-planner/

 

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