Meaglow also thanks all our customers for their support. 2018 was our best year so far for plasma source sales, our hollow cathode product lines (see our homepage at www.meaglow.com) continue an upward trajectory, especially within the atomic layer deposition community where our plasma sources are providing some of the highest quality nitride materials grown by that technique. We were particularly pleased to see publications this year by the University of Texas, Dallas group of Prof. Jiyoung Kim which showed exceptional (possibly the best) quality PE-ALD silicon nitride – grown using one of our hollow cathode plasma sources (see our July 16th article). There have also been publications by Berkeley National Laboratories – one of those in Nature Communications – and by others (see publications here).
This year we had our first sales to Germany, Israel, South Korea and the United Kingdom, in addition to sales to Taiwan, Turkey and the United States. Our first orders for 2019 are already in hand, with one of our university customers ordering their fourth and fifth hollow cathode sources for conversion of their new and existing commercial PE-ALD deposition equipment.
Below are a few customer photos of systems converted in 2018 and now operating with Meaglow’s hollow cathode plasma sources. These are now taking advantage of the low oxygen contamination that allows higher quality nitride films using Meaglow’s patented technology (see related company white papers here).