Congratulations to Lawrence Berkeley National Laboratories (LBNL) who have recently published an ALD related article in Nature Communications (see link here). The article relates to work on bioelectrochemical systems. LBNL converted one of their thermal ALD systems to plasma with a Meaglow hollow cathode plasma source back in 2015, and for this paper the plasma source has been used to produce silicon oxide layers at 80 degrees C. A second paper published in ACS Nano (see link here) also reports on silicon oxide produced with the Meaglow plasma source.
A number of such conversions have been carried out by Meaglow. See http://www.meaglow.com/hollow-cathode-sources-for-thermal-ald/
Other publications by our customers can be viewed at http://www.meaglow.com/publications/