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New company white paper on hollow cathode plasma sources

8 inch plasma source

Recognising that our customers would like more information, Meaglow has released a new company white paper describing the operation and advantages of our hollow cathode plasma sources. Our hollow cathode designs are well known for greatly reduced oxygen contamination issues, but there are other advantages, such as low plasma damage, scalability, high radial flux and high electron density. Our company white papers are available here. The new white paper can also be viewed at this link: Hollow Cathode Plasma Sources for Plasma Enhanced ALD and PECVD.

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