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New Hollow Cathode Plasma Sources Installed at Hanyang University, South Korea

Two Meaglow series 50 hollow cathode plasma sources have now been installed at Hanyang University, South Korea,  in the Nano-Device Engineering Laboratory. Apparently the first performed so well, they needed another. The picture to left shows the second source in operation at the university. A third plasma source has also now been supplied to a second group at Hanyang, as shown in the image below. To date six sources have been supplied throughout South Korea, and all the sources have been installed on locally built ALD systems with the cooperation of local vendors. Our local agent Paultec Company Ltd. can be contacted at

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