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Technical Notes

1. Oxygen Contamination in PE-ALD

2. Plasma Source Conversion – ICP to Hollow Cathode for Ultratech Inc’s Fiji® ALD Systems

3. Plasma Source Conversion – Ultratech Inc’s Savannah® thermal ALD to Hollow Cathode plasma operation

4. Optimum Plasma Source to Substrate Distance

 

 

Meaglow Ltd manufactures and sells crystal growth research reactors and is a prominent supplier of hollow cathode plasma sources to semiconductor research institutes and industry.

Disclaimer: Meaglow Ltd. is not affiliated with or endorsed or sponsored by Ultratech, Inc. Fiji®, Savannah® and Ultratech® are registered trademarks of Ultratech, Inc.

 

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