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Technical Notes

1. Oxygen Contamination in PE-ALD

2. Plasma Source Conversion – ICP to Hollow Cathode for Ultratech Inc’s Fiji® ALD Systems

3. Plasma Source Conversion – Ultratech Inc’s Savannah® thermal ALD to Hollow Cathode plasma operation

4. Optimum Plasma Source to Substrate Distance

5. Hollow Cathode Plasma Sources for Plasma Enhanced ALD and PECVD



Meaglow Ltd manufactures and sells crystal growth research reactors and is a prominent supplier of hollow cathode plasma sources to semiconductor research institutes and industry.

Disclaimer: Meaglow Ltd. is not affiliated with or endorsed or sponsored by Ultratech, Inc. Fiji®, Savannah® and Ultratech® are registered trademarks of Ultratech, Inc.


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