Dr. Richard Potter of the University of Liverpool, in the UK, has upgraded his thermal ALD system for deposition with a Meaglow hollow cathode plasma source. This upgrade, which proceeded earlier this year, adds to the ever growing list of equipment that has been converted for use with this enabling technology.
Apart from being relatively inexpensive, the Meaglow plasma source has the advantages of low oxygen contamination and has generally shown higher growth per cycle than other plasma sources. See our website at www.meaglow.com for details, or our recent white paper on hollow cathode plasma sources.
Dr. Potter used one of our very popular and versatile Series 50 plasma sources for this conversion. However, an ultrahigh-vacuum series is also available, as are custom plasma sources. Meaglow is happy to aid our customers. Congratulations to the University of Liverpool, we’re glad we could help with another successful adaptation.