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New Plasma Source for University of Connecticut

In December of 2017, Dr Necmi Biyikli of the University of Connecticut received a new hollow cathode plasma source for his Okyay Tech thermal ALD. The source has it’s own sample entry port, and ellipsometer ports. Additionally, this is one of Meaglow’s new large area sources, capable of very high electron density of 10^13 cm^-3 over the full deposition area. The system has been working well!



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