Series 16Hollow Cathode

The Series 16 Mini Plasma Source enabling research at the laboratory scale

Brochure

Features

The Series 16 is the result of a mini plasma source developed for NASA Goddard. This version is based on NW 16 fittings. The Series 16 is a compact alternative suitable for small research systems. A low cost RF power supply solution can also be supplied by Meaglow Ltd. This includes a 13.56 MHz pre amplifier (27.12 MHz is also possible), a linear amplifier, a power meter and manual match box, plus cabling.

  • Max. 80 watt operation continuously, up to 100 watt in pulse mode.
  • No water cooling. The system can get hot and present a heat hazard, air cooling can moderate this. 
  • Suitable for 2 to 4” wafers and smaller test samples.
  • Oxides, nitrides, other.
  • Hollow Cathode Technology with Low oxygen contamination.
  • Cost effective.
  • High density of up to 10 12 cm 3 or higher dependent on conditions.
  • Wide range of operating pressures (eg. from <200 mTorr to >10 Torr).
  • Improved growth per cycle for many material systems.

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